SRC, Stanford, TSMC demo copolymer lithography (EETimes)
Semiconductor Research Corp. (SRC), Stanford University and Taiwan Semiconductor Manufacturing Co. Ltd. (TSMC) claim that they have developed a top-gated field effect transistor (FET) and CMOS inverters featuring 20-nm contact holes. Stanford University - Field-effect transistor - CMOS - United States - SemiconductorTags: Cmos Inverters, Contact, Demo, Field Effect Transistor, Field Effect Transistor Fet, Holes, Lithography, Semiconductor Research, Stanford University, Taiwan Semiconductor Manufacturing, Taiwan Semiconductor Manufacturing Co, Taiwan Semiconductor Manufacturing Co Ltd, Transistor Cmos, Tsmc
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December 7, 2009 3:44 PM | 
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